Hexamethyldisilazane 99%

art: ch999-97-3
Formula C6H19NSi2
Molar mass 161.395 g/mol
CAS number 999-97-3

Available Options

0.5kg Hexamethyldisilazane 99%$20.00
1kg Hexamethyldisilazane 99%$35.00


Bistrimethylsilylamine (also known as hexamethyldisilazane, or HMDS) is an organosilicon compound. The molecule is a derivative of ammonia with trimethylsilyl groups in place of two hydrogen atoms. This colorless liquid is a reagent and a precursor to bases that are popular in organic synthesis and organometallic chemistry. In photolithography, HMDS is often used as an adhesion promoter for photoresist. Best results are obtained by applying HMDS from the gas phase on heated substrates. In electron microscopy, HMDS can be used as an alternative to critical point drying during sample preparation. In pyrolysis-gas chromatography-mass spectrometry, HMDS is added to the analyte to create sylilated diagnostic products during pyrolysis, in order to enhance detectability of compounds with polar functional groups.

Molar mass
161.395 g/mol
CAS Number
0.7741 g/cm3 at 25 deg C
>99% (Reagent Plus)
Melting point
-78 °C
Boiling point
125 °C
Solubility in water
392 mg/l at 25 °C/Estimated/
Solubility in ethanol
Refractive index (nD)
1.4090 at 20 °C

Note: The chemical specifications for some items on this product page may differ from the specifications listed above. For more information, consult with our manager. A detailed specification for any chemical product is available on request.


There are no reviews yet.

Be the first to review “Hexamethyldisilazane 99%”

Your email address will not be published. Required fields are marked *